If nothing happens when you click "Finish", this indicates that your computer is not giving you permission to overwrite the file that is already in that folder.  There are two possible ways to get around this:

1) You can run the Registration Tool in administrator mode by right-clicking on the icon for the Registration Tool and telling it to Run as Administrator. (If you don't see the option after right clicking, go to Properties and look in the Compatibility tab).

2) If that does not work you can go into the folder location where it is trying to deploy the license file (seen on the first screen of the Registration Tool as Deployment Destination) and deleting any license file that is already in there.